Maintaining the condition of the friction pair is an important measure to reduce mechanical failure. This paper integrates a vacuum elastohydrodynamic oil film measurement device and a current amplifier to simultaneously observe the optical interference image, friction coefficient and triboelectric signal during the friction process. In a high vacuum environment, the discharge phenomenon of steel balls corresponds to the time when the friction pair wears. Changes in the friction state in high vacuum environments have a significant impact on triboelectricity. Based on the relationship between the two, a sensor for real-time monitoring of the friction and wear status of the friction pair is designed, which provides a reliable real-time monitoring method for friction pair monitoring in vacuum machinery.